ISO 16794:2003规定了用红外光谱法测定六氟化铀（UF6）中作为杂质所含的烃、氯代烃和部分或完全取代的卤代烃或卤代烃的试验方法。 该方法不能用于在UF6（例如CF4）干扰下产生IR射线的化合物。 该检测方法是定量的，适用摩尔分数范围为0,001%或0,0010%，具体取决于杂质类型，最高可达0,100%。 该测试方法也可用于氢氟酸（HF）和以氟化物形式存在的几种元素的测定；硼在BF3中，硅在SiF4中，磷在PF5中，钼在MoF6中，钨在WF6中。

ISO 16794: 2003 specifies a test method for the determination of hydrocarbons, chlorocarbons and partially or completely substituted halocarbons or halohydrocarbons contained as impurities in uranium hexafluoride (UF₆) by infrared spectrometry. This method cannot be used for compounds giving IR rays with interference by UF₆ (for example CF₄). The test method is quantitative and applicable in the mole fraction from 0,000 1 % or 0,001 0 %, depending on the type of impurity, up to 0,100 %. The test method can also be used for the determination of hydrofluoric acid (HF) and several elements existing as fluorides; boron in BF₃, silicon in SiF₄, phosphorus in PF₅, molybdenum in MoF₆ and tungsten in WF₆.