ISO 22309:2011给出了使用安装在扫描电子显微镜或电子探针微分析仪上的能量色散光谱法（EDS）对样本特定点或区域进行定量分析的指南；任何数量的表达，即以百分比（质量分数）表示的大/小或大/小量被认为是定量的。样本中所有元素的正确识别是定量分析的必要部分，因此ISO 22309中考虑了这一点。ISO 22309提供了各种方法的指南，适用于使用参考材料或“无标准”程序对质量分数低至1%的常规定量分析。 对于原子序数为Z>；10 使用Z<分析轻元素的指南；也给出了11。

ISO 22309:2011 gives guidance on the quantitative analysis at specific points or areas of a specimen using energy-dispersive spectrometry (EDS) fitted to a scanning electron microscope or an electron probe microanalyser; any expression of amount, i.e. in terms of percent (mass fraction), as large/small or major/minor amounts is deemed to be quantitative. The correct identification of all elements present in the specimen is a necessary part of quantitative analysis and is therefore considered in ISO 22309. ISO 22309 provides guidance on the various approaches and is applicable to routine quantitative analysis of mass fractions down to 1 %, utilizing either reference materials or "standardless" procedures. It can be used with confidence for elements with atomic number Z > 10. Guidance on the analysis of light elements with Z < 11 is also given.