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Journal AWWA - Planning for Water Reclamation in a Semiconductor Fabrication Facility AWWA期刊-半导体制造设施中水回收规划
发布日期: 2002-07-01
半导体制造业是水资源最密集的行业之一 行业。1996年,大型企业英特尔公司 半导体制造商,使用量13.2毫克/日(50毫升/日) 在全世界面临水费上涨、供应短缺和 提高公众对工业废物、微电子的认识 业界一直在研究缓解压力的方案 制造过程对环境的影响。这 这项研究旨在说明水资源回收利用 现有技术可以有效利用。 水的回收利用减少了人类所需的水量 生产过程中废水的再利用和回收。 开发了一个水回收计划的通用设计 位于亚利桑那州中部的大型微电子生产设施。 设计包括系统描述、图表和流程 分析和可修改以适应区域气候, 废水基础设施、水源水质和排放 章程 尽管对电厂系统的改造可能会产生高额资本 成本方面,投资回收期可能只有几个月。 半导体制造商可以通过以下方式获得更大的节约: 将填海规划纳入新项目的设计中 设施包括19个参考文献,图。
Semiconductor manufacturing is one of the most waterintensive industries. In 1996, Intel Corporation, a large semiconductor manufacturer, used 13.2 mgd (50 ML/d) worldwide. Faced by rising water costs, scarcity of supplies, and heightened public awareness about industrial waste, the microelectronics industry has been investigating options for mitigating the environmental effects of its manufacturing processes. This study was undertaken to show how water reclamation using existing technologies can be effectively used. Water reclamation reduces the amount of water needed by reusing and recycling wastewater from manufacturing processes. A generic design for a water reclamation plan was developed for a large-scale microelectronic production facility in central Arizona. The design included system descriptions, diagrams, and flow analyses and can be modified to address regional climates, wastewater infrastructure, source water quality, and discharge regulation. Although modifications to plant systems may incur high capital costs, the payback period can be as little as several months. Semiconductor manufacturers can reap even greater savings by incorporating reclamation planning in the design of new facilities. Includes 19 references, figure.
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发布单位或类别: 美国-美国给水工程协会
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