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现行 ISO/TS 6737:2023
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Vacuum technology — Vacuum gauges — Characteristics for a stable ionisation vacuum gauge 真空技术真空计稳定电离真空计的特性
发布日期: 2023-11-28
本文件描述了一种电离真空计的特殊设计,它具有明确的电离电子路径长度。[2]由于结构设计,它具有良好的测量精度、长期稳定性,以及对氮和相对灵敏度因子的独立和可重复的灵敏度[3][4]。它是为10-6的测量范围设计的?Pa到10比2?爸爸。 该文件仅描述了与电子和离子轨迹相关的测量头的尺寸和电位。该文件没有详细描述操作电离真空计所需的电气部件。测量头可以通过市售的电压和电源以及电流表来操作,但也可以通过专门为该测量头的操作而构建的控制器来操作。本文件中描述的电离真空计可以由其他电离真空计的任何有经验的制造商制造。它不受知识产权保护。 对于本文件,假定申请人熟悉电离真空计的物理和原理以及一般的高真空和超高真空技术。

This document describes a special design of an ionisation vacuum gauge which has a well-defined ionising electron path length.[2] Due to the construction design, it leads to good measurement accuracy, long-term stability, as well as gauge independent and reproducible sensitivity for nitrogen and relative sensitivity factors[3][4]. It is designed for the measurement range of 10-6?Pa to 10-2?Pa.

This document describes only those dimensions and potentials of the gauge head which are relevant for the electron and ion trajectories. This document does not describe the electrical components necessary to operate the ionisation vacuum gauge in detail. The gauge head can be operated by voltage and power sources and ammeters commercially available, but also by a controller specially built for the purpose of the operation of this gauge head.

The ionisation vacuum gauge described in this document can be built by any experienced manufacturer of other ionisation vacuum gauges. It is not subject to intellectual property protection.

It is assumed for this document that the applicant is familiar with both the physics and principles of ionisation vacuum gauges as well as high and ultra-high vacuum technology in general.

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归口单位: ISO/TC 112
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