1.1 本指南描述了一种方法，使用户和分析员可以确定有助于使用X射线光电子能谱（XPS）获得有意义的表面化学数据的校准和标准，并针对特定的分析目标和数据收集时间优化仪器。 1.2 本指南提供了有组织的信息收集或一系列选项，并不推荐具体的行动方案。本指南不能取代教育或经验，应与专业判断结合使用。并非本指南的所有方面都适用于所有情况。 1.3 以国际单位制表示的数值应视为标准值。本标准不包括其他计量单位。 1.4 本标准不代表或取代必须根据其判断给定专业服务的充分性的谨慎标准，也不应在不考虑项目的许多独特方面的情况下应用本文件。 本文件标题中的“标准”一词仅表示该文件已通过ASTM共识程序获得批准。 1.5 本标准并非旨在解决与其使用相关的所有安全问题（如有）。本标准的用户有责任在使用前制定适当的安全、健康和环境实践，并确定监管限制的适用性。 1.6 本国际标准是根据世界贸易组织技术性贸易壁垒（TBT）委员会发布的《关于制定国际标准、指南和建议的原则的决定》中确立的国际公认标准化原则制定的。 ====意义和用途====== 4.1 本指南的目的是帮助用户和分析人员选择与定义的XPS实验相关的标准化程序。 例如，这些实验可以基于材料失效分析、固体表面化学的测定或薄膜或涂层的成分分布。将总结一系列选项，给出与特定信息要求相关的标准。ISO 15470和ISO 10810还帮助XPS用户进行典型样品的实验设计。ASTM委员会E42和ISO TC201正在不断更新和添加标准和指南。建议参考ASTM和ISO网站了解最新标准列表。

1.1 This guide describes an approach to enable users and analysts to determine the calibrations and standards useful to obtain meaningful surface chemistry data with X-ray photoelectron spectroscopy (XPS) and to optimize the instrument for specific analysis objectives and data collection time. 1.2 This guide offers an organized collection of information or a series of options and does not recommend a specific course of action. This guide cannot replace education or experience and should be used in conjunction with professional judgment. Not all aspects of this guide will be applicable in all circumstances. 1.3 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard. 1.4 This standard is not intended to represent or replace the standard of care by which the adequacy of a given professional service must be judged, nor should this document be applied without consideration of a project’s many unique aspects. The word “Standard” in the title of this document means only that the document has been approved through the ASTM consensus process. 1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use. 1.6 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee. ====== Significance And Use ====== 4.1 The purpose of this guide is assist users and analysts in selecting the standardization procedures relevant to a defined XPS experiment. These experiments may be based, for example, upon material failure analysis, the determination of surface chemistry of a solid, or the composition profile of a thin film or coating. A series of options will be summarized giving the standards that are related to specific information requirements. ISO 15470 and ISO 10810 also aid XPS users in experiment design for typical samples. ASTM Committee E42 and ISO TC201 are in a continuous process of updating and adding standards and guides. It is recommended to refer to the ASTM and ISO websites for a current list of standards.