IEC 62047的本部分规定了术语和定义，以及性能测试方法 振动驱动MEMS驻极体能量收集装置的特性测定 消费者、行业或任何应用的参数。 本文件适用于振动驱动的驻极体能量收集装置 间隙小于1000µm的电极由带有陷阱电荷的介电材料覆盖 通过蚀刻、光刻或沉积等MEMS工艺制造。购买本文件时可获得的所有当前修订均包含在购买本文件中。

This part of IEC 62047 specifies terms and definitions, and a performance testing method of vibration driven MEMS electret energy harvesting devices to determine the characteristic parameters for consumer, industry or any application. This document applies to vibration driven electret energy harvesting devices whose electrodes with a gap below 1 000 µm are covered by dielectric material with trapped charges and are fabricated by MEMS processes such as etching, photolithography or deposition.All current amendments available at time of purchase are included with the purchase of this document.