Vacuum technology. Standard methods for measuring vacuum-pump performance-Turbomolecular vacuum pumps
真空技术 测量真空泵性能的标准方法
发布日期:
2018-08-23
BS ISO 21360-4:2018与ISO 21360-1一起规定了涡轮分子真空泵性能特性的测量方法。适用于各种尺寸、各种型号的涡轮分子真空泵,包括带机械或磁力轴承的涡轮分子真空泵;轴上有或没有附加的阻力级或其他泵级;带有一个或多个进气口。交叉引用:ISO 21360-1:2012ISO 3529-2购买时可用的所有现行修订版均包含在本文件的购买中。
BS ISO 21360-4:2018, in conjunction with ISO 21360-1, specifies methods for the measurement of performance characteristics of turbomolecular vacuum pumps. It is applicable to all sizes and all types of turbomolecular vacuum pumps, including thosewith mechanical or magnetic bearings;with or without an additional drag stage(s) or other pumping stages on the shaft;with one or more inlet ports.Cross References:ISO 21360-1:2012ISO 3529-2All current amendments available at time of purchase are included with the purchase of this document.