指定长度和宽度小于1毫米，厚度不超过10米的薄膜材料的拉伸试验方法，这是微机电系统（MEMS），微型机械和类似装置的主要结构材料。 用于MEMS，微机械和类似装置的主要结构材料具有特殊特征，例如几微米级的典型尺寸，通过沉积的材料制造，以及通过使用蚀刻和光刻的非机械加工的试件制造。本国际标准规定了测试方法，能够保证与特殊功能相对应的精度

Specifies the method for tensile testing of thin film materials with length and width under 1 mm and thickness under 10 m, which are main structural materials for micro-electromechanical systems (MEMS), micromachines and similar devices. The main structural materials for MEMS, micromachines and similar devices have special features such as typical dimensions in the order of a few microns, a material fabrication by deposition, and a test piece fabrication by non-mechanical machining using etching and photolithography. This International Standard specifies the testing method, which enables a guarantee of accuracy corresponding to the special features.