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Surface chemical analysis — Medium-resolution Auger electron spectrometers — Calibration of energy scales for elemental analysis 表面化学分析中分辨俄歇电子能谱仪元素分析能标的校准
发布日期: 2024-07-03
本文件规定了一种不确定度为3?eV,用于识别表面元素的一般分析用途。本文件还规定了建立校准计划的方法。 它适用于直接或差分模式下使用的仪器,其中分辨率小于或等于0.5?%,如果使用差分模式,调制幅度为2?eV峰对峰。它适用于那些装有惰性气体离子枪或其他方法进行样品清洗的光谱仪,并带有能够在4?keV或更高的束流能量。

This document specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers with an uncertainty of 3?eV, for general analytical use in identifying elements at surfaces. This document also specifies a method for establishing a calibration schedule.

It is applicable to instruments used in either direct or differential mode, where the resolution is less than or equal to 0,5?% and the modulation amplitude for the differential mode, if used, is 2?eV peak-to-peak. It is applicable to those spectrometers equipped with an inert gas ion gun or other method for sample cleaning and with an electron gun capable of operating at 4?keV or higher beam energy.

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归口单位: ISO/TC 201/SC 7
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