ISO 25178的本部分规定了校准、调整和验证 具有平面而非全三维测量行为的区域地形测量仪器 与计量学影响相关的测量不确定度分量的测定 特点。它考虑了所有区域仪器的共同点，包括。点传感 带有横向扫描装置的仪器。对于仪器特定原理，其他部分可能是 在ISO标准25178的700系列中开发。特别是接触系统的校准 本标准不包括额外的弓形运动，可能会在将来的修订中描述 ISO 25178-701标准。

This document specifies generic procedures for the calibration, adjustment and verification of metrological characteristics that areal topography measuring instruments have in common, as stated in ISO 25178-600. Because surface profiles can be extracted from surface topography images, most of the methods described in this document can be adapted to profiling instruments. Instrument-specific issues are not covered by this document. For example, for instruments based on mechanical probing where the probe follows an additional arcuate motion, additional measures are specified in ISO 25178-701. This document does not include procedures for area-integrating methods, although those are also stated in ISO 25178-6. For example, light scattering belongs to a class of techniques known as area-integrating methods for measuring surface topography.