超声波振动可以提高超精加工性能，从而减少轴向振动。对于无超声振动的常规超精加工，当轴向振动振幅从1 MM减小到0.5 MM时，坯料去除率大大降低。然而，减少冲程长度时的性能损失可以通过使用超声波振动来恢复或稍微改善，具有类似的石材磨损和表面光洁度。

ULTRASONIC VIBRATIONS CAN ENHANCE SUPERFINISHING PERFORMANCE, ALLOWING FOR A REDUCTION OF THE AXIAL STONE OSCILLATION. FOR CONVENTIONAL SUPERFINISHING WITHOUT ULTRASONIC VIBRATIONS, THE STOCK REMOVAL IS GREATLY REDUCED WHEN THE AMPLITUDE OF AXIAL STONE OSCILLATION IS REDUCED FROM 1 MM TO 0.5 MM. HOWEVER, THE LOSS IN PERFORMANCE AT THE REDUCED STROKE LENGTH CAN BE RESTORED OR SLIGHTLY IMPROVED UPON BY THE USE OF ULTRASONIC VIBRATIONS, WITH COMPARABLE STONE WEAR AND SURFACE FINISH.