Geometric inaccuracies of the guide rails and structural parts adversely affect the tracking accuracy of machine tool slideways. These deviations are introduced by factors such as manufacturing and assembly inaccuracies, thermal and structural distortions. A mapping of the effects of component level geometric and form deviations on the tracking errors of a machine slideways is presented. A numerical algorithm for contact deformation at the sliding joint, based on the elastic foundation model, is also included. Autocollimator experiments on a T slideway are used to investigate pitch and yaw errors and to validate the models. Measurements of pitch and yaw error made on a T slideway compare favorably with the model predictions.