1.1 本指南适用于被认为含有低ppt（万亿分之一，重量/重量）水平阴离子污染物（例如，溴化物、氯化物、氟化物、硝酸盐、亚硝酸盐、磷酸盐和硫酸盐）的超纯水。为了最大限度地减少分析之间的遗留问题，最好将任何一种污染物的浓度限制在大约200ppt（尽管这个限制只是一个近似值，可能会根据用户的应用而变化）。 1.2 本指南旨在帮助分析人员避免超纯水样品的污染，因为在定量抓取样品中ppt水平的阴离子时，污染控制是主要挑战。 1.3 本指南不包括从水源收集样本的建议。 1.4 本标准并非旨在解决与其使用相关的所有安全问题（如有）。本标准的使用者有责任在使用前制定适当的安全、健康和环境实践，并确定监管限制的适用性。 1.5 本国际标准是根据世界贸易组织技术性贸易壁垒委员会发布的《关于制定国际标准、指南和建议的原则的决定》中确立的国际公认的标准化原则制定的。 ====意义和用途====== 4.1 本指南旨在帮助半导体行业的分析师。阴离子监测的有用性示例包括:( 1. )确定离子交换树脂床（在水净化系统中）何时需要再生，以及( 2. )确保阴离子水平足够低以允许水用于半导体器件的制造。 4.2 为了确保阴离子确实处于低ppt水平，建议在进行第节之前检查子样本的电导率 5. 本指南。这种检查不需要精确；它的目的只是让分析员知道电导率是否高于最高电导率- 正在测试的水平标准溶液。任何高读数都表明，如果对样本进行分析，可能会污染仪器。

1.1 This guide applies to ultrapure water that is thought to contain low ppt (parts-per-trillion, weight/weight) levels of anionic contaminants (for example, bromide, chloride, fluoride, nitrate, nitrite, phosphate, and sulfate). To minimize carry-over problems between analyses, it is best to limit the concentration of any one contaminant to approximately 200 ppt (although this limit is only an approximation and may vary, depending on the user’s application). 1.2 This guide is intended to help analysts avoid contamination of ultrapure-water samples, since contamination control is the primary challenge when quantifying ppt-level anions in grab samples. 1.3 This guide does not include recommendations for collecting samples from the water source. 1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use. 1.5 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee. ====== Significance And Use ====== 4.1 This guide is intended to help analysts in the semiconductor industry. Examples of the usefulness of anion monitoring include: ( 1 ) determining when ion-exchange resin beds (in water-purification systems) need to be regenerated, and ( 2 ) ensuring that anion levels are low enough to allow the water to be used for the manufacture of semiconductor devices. 4.2 To ensure that the anions are indeed at low-ppt levels, it is recommended to check the conductivity of a subsample before proceeding with Section 5 of this guide. This check does not need to be exact; its purpose is simply to let the analyst know if the conductivity is higher than that of the highest-level standard solution being tested. Any high reading signifies that the sample, if analyzed, might contaminate the instrument.