1.1 本试验方法涵盖拟安装到高纯度气体分配系统中的气体分配系统部件。 1.1.1 本试验方法描述了一种程序，旨在对在侵蚀性条件下测试的阀门的颗粒生成性能进行统计显著比较。 1.1.2 一旦对特定阀门进行了测试，该测试方法不作为监测正在进行的颗粒性能的方法。 1.2 该测试方法利用了应用于半导体应用中典型使用的在线气阀的冷凝核计数器（CNC）。适用于各种类型的自动和手动阀门（如隔膜或波纹管），6。 3至12.7毫米( 1. / 4. 通过 1. / 2. -英寸。）大小关于本试验方法在大型阀门上的应用，见附录中的表。 1.2.1 大于12.7 mm的阀门( 1. / 2. 英寸。）可以通过这种方法进行测试。测试台的尺寸必须相应。大于12.7 mm的部件( 1. / 2. 英寸。）应在保持雷诺数为20的情况下进行测试 000至21 这是12.7毫米的雷诺数( 1. / 2. -英寸。）以30.5米/秒（100英尺/秒）的速度测试部件。 1.3 限制: 1.3.1 该测试方法适用于大于冷凝核粒子计数器最小检测极限（MDL）的总粒子数，并且不考虑将数据分类到各种大小范围。 1.3.1.1 是否可以从非动态部件（如管件和短管）生成重要数据，以与从短管生成的数据进行统计显著性比较，这是值得怀疑的。因此，该测试方法无法可靠地支持这些类型组件之间的比较。 1.3.1.2 如果感兴趣的是在激光粒子计数器（LPC）技术的尺寸范围内对粒子进行检测或分类，或两者兼而有之，则可以使用LPC测试组件。本试验方法中概述的流速、试验时间、取样装置和数据分析不适用于LPC。由于这些差异，来自CNC的数据与来自LPC的数据不具有可比性。 1.3.2 本试验方法规定了超过典型值的流动和机械应力条件。这些条件不应超过制造商建议的条件。正常操作条件下的实际性能可能会有所不同。 1.3.3 试验方法仅限于氮气或清洁干燥空气。其他气体的性能可能有所不同。 1.3.4 本试验方法适用于在相当于六个月经验的水平上理解仪器使用的操作员。 1.3.5 使用本试验方法时，应参考适当的粒子计数器制造商的操作和维护手册。 1.4 以国际单位制表示的数值应视为标准。 括号中的英寸-磅单位仅供参考。 1.5 本标准并非旨在解决与其使用相关的所有安全问题（如有）。本标准的用户有责任在使用前制定适当的安全、健康和环境实践，并确定监管限制的适用性。 第节给出了具体的危险说明 6. ，危险。 1.6 本国际标准是根据世界贸易组织技术性贸易壁垒（TBT）委员会发布的《关于制定国际标准、指南和建议的原则的决定》中确立的国际公认标准化原则制定的。 ====意义和用途====== 4.1 本试验方法的目的是确定拟安装到高纯度气体分配系统中的部件的试验程序。本试验方法的应用预计将在为本装置鉴定而测试的部件之间产生可比数据。 4.2 背景测试- 该测试方法使用背景测试，以确保系统不会产生高于可接受低水平的颗粒。这样可以确保所看到的计数来自测试设备，而不是来自受污染的系统。用于获取背景计数的技术不会产生与测试设备就位时存在的条件相同的条件。 建议定期运行控制产品，以确保其结果一致。这些控制产品应该是颗粒释放量最低的产品。它们将进一步证明系统在测试的静态、动态或冲击部分不会产生过量颗粒。 4.3 该测试方法可用于测试油管的长度。流量标准将与阀门的流量标准相同。油管测试仅包括静态背景、冲击背景以及方法的静态和冲击部分。可以通过驱动上游气动阀（PV1）来添加动态部分，从而对管道的测试长度产生流量冲击。

1.1 This test method covers gas distribution system components intended for installation into a high-purity gas distribution system. 1.1.1 This test method describes a procedure designed to draw statistically significant comparisons of particulate generation performance of valves tested under aggressive conditions. 1.1.2 This test method is not intended as a methodology for monitoring on-going particle performance once a particular valve has been tested. 1.2 This test method utilizes a condensation nucleus counter (CNC) applied to in-line gas valves typically used in semiconductor applications. It applies to automatic and manual valves of various types (such as diaphragms or bellows), 6.3 through 12.7-mm ( 1 / 4 through 1 / 2 -in.) size. For applications of this test method to larger valves, see the table in the appendix. 1.2.1 Valves larger than 12.7 mm ( 1 / 2 in.) can be tested by this methodology. The test stand must be sized accordingly. Components larger than 12.7 mm ( 1 / 2 in.) should be tested while maintaining a Reynolds number of 20 000 to 21 000. This is the Reynolds number for 12.7-mm ( 1 / 2 -in.) components tested at a velocity of 30.5 m/s (100 ft/s). 1.3 Limitations: 1.3.1 This test method is applicable to total particle count greater than the minimum detection limit (MDL) of the condensation nucleus particle counter and does not consider classifying data into various size ranges. 1.3.1.1 It is questionable whether significant data can be generated from nondynamic components (such as fittings and short lengths of tubing) to compare, with statistical significance, to the data generated from the spool piece. For this reason, this test method cannot reliably support comparisons between these types of components. 1.3.1.2 If detection or classification of particles, or both, in the size range of laser particle counter (LPC) technology is of interest, an LPC can be utilized for testing components. Flow rates, test times, sampling apparatus, and data analysis outlined in this test method do not apply for use with an LPC. Because of these variations, data from CNCs are not comparable to data from LPCs. 1.3.2 This test method specifies flow and mechanical stress conditions in excess of those considered typical. These conditions should not exceed those recommended by the manufacturer. Actual performance under normal operating conditions may vary. 1.3.3 The test method is limited to nitrogen or clean dry air. Performance with other gases may vary. 1.3.4 This test method is intended for use by operators who understand the use of the apparatus at a level equivalent to six months of experience. 1.3.5 The appropriate particle counter manufacturer's operating and maintenance manuals should be consulted when using this test method. 1.4 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only. 1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 6 , Hazards. 1.6 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee. ====== Significance And Use ====== 4.1 The purpose of this test method is to define a procedure for testing components intended for installation into a high-purity gas distribution system. Application of this test method is expected to yield comparable data among components tested for the purposes of qualification for this installation. 4.2 Background Testing— This test method uses background testing to ensure that the system is not contributing particles above a low, acceptable level. This ensures that counts seen are from the test device, not from a contaminated system. The techniques used to obtain background counts do not produce conditions identical to the conditions existing when a test device is in place. It is recommended that the control products be run periodically to see that they give consistent results. These control products should be the lowest particle release products. They will be additional proof that the system is not contributing excess particles during the static, dynamic, or impact portions of the test. 4.3 This test method can be used for testing lengths of tubing. The flow criteria will be identical to that indicated for valves. A tubing test would only include the static background, the impact background, and the static and impact portions of the method. A dynamic portion could be added by actuating the upstream pneumatic valve (PV1), thus creating a flow surge to the test length of tubing.