Semiconductor devices - Micro-electromechanical devices - Part 44: Test methods for dynamic performances of MEMS resonant electric-field-sensitive devices
半导体器件.微机电器件.第44部分:MEMS谐振电场敏感器件动态性能的试验方法
IEC 62047-44:2024 describes terminology, definitions and test methods that are used to evaluate and determine the dynamic performance of MEMS (Micro-Electromechanical Systems) resonant electric?field?sensitive devices. It also specifies sample requirements and test equipment for dynamic performances of MEMS resonant electric?field?sensitive devices. The statements made in this document are also applicable to MEMS resonant electric?field?sensitive devices with various driving mechanisms such as electrostatic, electrothermal, electromagnetic, piezoelectric, etc.