BS IEC 62047-34:2019-半导体器件微机电设备-国家数字标准馆

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Semiconductor devices. Micro-electromechanical devices-Test methods for MEMS piezoresistive pressure-sensitive device on wafer 半导体器件微机电设备

发布日期： 2019-04-16

BS IEC 62047-34:2019描述了电气特性、静电特性的试验条件和试验方法
MEMS压敏器件的性能和热性能。这
本文件适用于开环和闭环压阻式MEMS压力测试
晶圆上的设备。交叉引用:IEC 60747-14-3IEC 61193-2ISO/IEC指南98-3购买时可用的所有现行修订版均包含在本文件的购买中。

BS IEC 62047-34:2019 describes test conditions and test methods of electric character, static
performances and thermal performances for MEMS pressure-sensitive devices. This
document applies to test for both open and closed loop piezoresistive MEMS pressure
devices on wafer.Cross References:IEC 60747-14-3IEC 61193-2ISO/IEC Guide 98-3All current amendments available at time of purchase are included with the purchase of this document.

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发布单位或类别：英国-英国标准学会

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