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现行 ASTM E493/E493M-11(2022)
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Standard Practice for Leaks Using the Mass Spectrometer Leak Detector in the Inside-Out Testing Mode 在由内向外测试模式下使用质谱检漏仪检漏的标准实施规程
发布日期: 2022-06-01
1.1 这种做法 2. 涵盖测试前密封的设备的测试程序,例如半导体、密封继电器、烟火设备等,以检测外壳壁的泄漏。它们可以以不同的灵敏度使用(取决于内部体积、外壳的强度、准备测试的可用时间以及外壳材料对氦的吸附特性)。一般情况下,灵敏度限值为10 −10 至10 −6. Pa m公司 3. /s(10 −9 标准cm 3. /s到10 −5. 标准cm 3. /尽管在某些情况下,在任何方向上都可能超过这些极限几十年。 1.2 描述了两种试验方法: 1.2.1 试验方法A- 通过轰炸制备测试零件。 1.2.2 试验方法B- 通过预填充制备测试零件。 1.3 单位- 以国际单位制或标准立方厘米/秒单位表示的值应单独视为标准值。每个系统中规定的值可能不是精确的等效值: 因此,每个系统应相互独立使用。将两个系统的值合并可能会导致不符合标准。 1.4 本标准并非旨在解决与其使用相关的所有安全问题(如有)。本标准的用户有责任在使用前制定适当的安全、健康和环境实践,并确定监管限制的适用性。 1.5 本国际标准是根据世界贸易组织技术性贸易壁垒(TBT)委员会发布的《关于制定国际标准、指南和建议的原则的决定》中确立的国际公认标准化原则制定的。 ====意义和用途====== 6.1 方法A或B适用于测试具有内部体积的密封装置。已确定微电子设备的最大可接受泄漏率,以确保性能特性不会受到in的影响- 预计使用寿命内的空气、水蒸气或其他污染物泄漏。必须注意控制轰炸压力、轰炸时间和轰炸后的停留时间,否则结果可能会发生很大变化。
1.1 This practice 2 covers procedures for testing devices that are sealed prior to testing, such as semiconductors, hermetically enclosed relays, pyrotechnic devices, etc., for leakage through the walls of the enclosure. They may be used with various degrees of sensitivity (depending on the internal volume, the strength of the enclosure, the time available for preparation of test, and on the sorption characteristics of the enclosure material for helium). In general practice the sensitivity limits are from 10 −10 to 10 −6 Pa m 3 /s (10 −9 standard cm 3 /s to 10 −5 standard cm 3 /s at 0°C) for helium, although these limits may be exceeded by several decades in either direction in some circumstances. 1.2 Two test methods are described: 1.2.1 Test Method A— Test part preparation by bombing. 1.2.2 Test Method B— Test part preparation by prefilling. 1.3 Units— The values stated in either SI or std-cc/sec units are to be regarded separately as standard. The values stated in each system may not be exact equivalents: therefore, each system shall be used independently of the other. Combining values from the two systems may result in non-conformance with the standard. 1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use. 1.5 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee. ====== Significance And Use ====== 6.1 Methods A or B are useful in testing hermetically-sealed devices with internal volumes. Maximum acceptable leak rates have been established for microelectronic devices to assure performance characteristics will not be affected by in-leakage of air, water vapor or other contaminants over the projected life expected. Care must be taken to control the bombing pressure, bombing time and dwell time after bombing or the results can vary substantially.
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归口单位: E07.08
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