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现行 KS I ISO 14644-2-2017(2022)
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클린룸 및 제어된 환경 — 제2부:클린룸 성능 확인을 위한 입자 농도 모니터링 洁净室和相关受控环境.第2部分:通过颗粒浓度提供洁净室性能证据的监测
发布日期: 2017-12-26
该标准基于测量或影响空气悬浮颗粒物浓度的参数,指定颗粒物浓度对空气洁净度相关洁净室或洁净区性能监控计划的最低要求。
이 표준에서는 공기 부유 입자 농도를 측정하거나 영향을 주는 매개변수를 기준으로, 입자 농도에 의한 공기 청정도 관련 클린룸 또는 청정 구역 성능에 대한 모니터링 계획의 최소 요구사항을 지정 한다.
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