ISO 18452:2005-精细陶瓷（高级陶瓷、高级工业陶瓷）——用接触探针轮廓仪测定陶瓷膜厚度 -国家数字标准馆

现行 ISO 18452:2005

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Fine ceramics (advanced ceramics, advanced technical ceramics) — Determination of thickness of ceramic films by contact-probe profilometer 精细陶瓷（高级陶瓷、高级工业陶瓷）——用接触探针轮廓仪测定陶瓷膜厚度

发布日期： 2005-11-16

ISO 18452:2005规定了用接触探针轮廓仪测定精细陶瓷膜和陶瓷涂层的膜厚度的方法。该方法适用于10 nm至10000 nm范围内的薄膜厚度。

ISO 18452:2005 specifies a method for the determination of the film thickness of a fine ceramic film and ceramic coatings by a contact-probe profilometer. The method is suitable for film thicknesses in the range of 10 nm to 10 000 nm.

分类信息

发布单位或类别：国际组织-国际标准化组织

ICS分类： 81.060.30陶瓷 - 高级陶瓷

关联关系

研制信息

归口单位： ISO/TC 206

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