扫描探针坐标测量机与传统的触控触发探针系统相比有许多优点，因为在短时间内可以收集大量数据。在检查过程中，扫描探针与零件表面保持恒定接触，从而在探针和零件之间产生接触力。这会使探针尖端偏离其自由位置。为了保持精度，必须精确控制该力。同时，还必须控制与零件表面相切的探针移动。本文针对机械手控制领域中常见的力/位置混合控制器，提出了扫描探针控制问题。

Scanning probe coordinate measuring machines have many advantages over the traditional touch trigger probe systems due to the fact that a tremendous amount of data can be collected during inspection in a short amount of time. A scanning probe maintains constant contact with the part surface during inspection generating a contact force between the probe and part. This deflects the probe tip from its free position. To maintain accuracy, this force must be precisely controlled. Simultaneously, probe movement tangent to the part surface must also be controlled. This paper formulates the scanning probe control problem in terms of the hybrid class of force/position controllers commonly investigated in the field of robotic manipulator control.