ISO 22489:2016规定了通过使用安装在电子探针微分析仪或扫描电子显微镜（SEM）上的波长色散光谱仪（WDS）分析电子束产生的X射线来确定的试样微米体积中元素的量化要求。 ISO 22489:2016还描述了以下内容: -定量分析的原理； -该技术在元素、质量分数和参考样品方面的总体覆盖范围； -仪器的一般要求； -涉及的基本程序，如样品制备、实验条件选择、测量、分析和报告。 ISO 22489:2016旨在使用正入射光束对扁平均匀的块状试样进行定量分析。它没有规定仪器或数据简化软件的详细要求。操作员应从所用产品的制造商处获取安装条件、详细操作程序和仪器规格等信息。

ISO 22489:2016 specifies requirements for the quantification of elements in a micrometre-sized volume of a specimen identified through analysis of the X-rays generated by an electron beam using a wavelength dispersive spectrometer (WDS) fitted either to an electron probe microanalyser or to a scanning electron microscope (SEM). ISO 22489:2016 also describes the following: - the principle of the quantitative analysis; - the general coverage of this technique in terms of elements, mass fractions and reference specimens; - the general requirements for the instrument; - the fundamental procedures involved such as specimen preparation, selection of experimental conditions, the measurements, the analysis of these and the report. ISO 22489:2016 is intended for the quantitative analysis of a flat and homogeneous bulk specimen using a normal incidence beam. It does not specify detailed requirements for either the instruments or the data reduction software. Operators should obtain information such as installation conditions, detailed procedures for operation and specification of the instrument from the makers of any products used.