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现行 DIN 32567-1
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Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 1: Qualitative estimation of the material and procedure specific influences 微系统生产设备.材料对光学和触觉尺寸计量影响的测定.第1部分:材料和程序特定影响的定性估计
发布日期: 2015-06-01
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发布单位或类别: 德国-德国标准化学会
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