用于制造半导体器件的设施利用各种因毒性、易燃性和/或爆炸性而有害的气体。将这些气体分配到工艺设备需要安装系统，该系统将安全问题与气体纯度结合起来，以实现成功的设备制造。本文将概述整个配电系统的设计标准，并讨论利用排气通风来实现其中一些目标。还将讨论将所需排气量降至最低的系统设计方面。单位:SICitation:研讨会，ASHRAE交易，1985年，第91卷，pt。你好，檀香山2B

Facilities for fabrication of semiconductor devices utilize various gases that are hazardous due to toxicity, flammability and/or explosiveness. Distribution of these gases to the process equipment requires installation of systems which integrate the concerns of safety with gas purity to allow successful device manufacturing. This paper will outline overall distribution system design criteria and discuss utilization of exhaust ventilation to obtain some of these goals. Aspects of the system design that minimize the required exhaust will also be discussed.Units: SI