BS IEC 63068-2:2019提供了光学检测的定义和指南 商用4H-SiC（碳化硅）外延片中生长缺陷的检测 薄饼。此外，本文件举例说明了光学图像，以实现检测和分析 SiC同质外延片缺陷的分类。交叉引用:ISO 24173购买本文件时提供的所有现行修订均包含在购买本文件中。

BS IEC 63068-2:2019 provides definitions and guidance in use of optical inspection for detecting as-grown defects in commercially available 4H-SiC (Silicon Carbide) epitaxial wafers. Additionally, this document exemplifies optical images to enable the detection and categorization of the defects for SiC homoepitaxial wafers.Cross References:ISO 24173All current amendments available at time of purchase are included with the purchase of this document.