BS ISO 22278:2020-精细陶瓷（高级陶瓷、高级工业陶瓷）用平行X射线束X射线衍射法测定单晶薄膜（晶圆）结晶质量的试验方法-国家数字标准馆

现行 BS ISO 22278:2020

到馆提醒

收藏跟踪

购买正版

Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam 精细陶瓷（高级陶瓷、高级工业陶瓷）用平行X射线束X射线衍射法测定单晶薄膜（晶圆）结晶质量的试验方法

发布日期： 2020-08-26

本文件规定了使用平行X射线束X射线衍射法测量单晶薄膜（晶圆）结晶质量的试验方法。本文件适用于所有作为块体或外延层结构的单晶薄膜（晶圆）。购买本文件时可获得的所有当前修订均包含在购买本文件中。

This document specifies the test method for measuring the crystalline quality of single-crystal thin film (wafer) using the XRD method with parallel X-ray beam. This document is applicable to all of the single-crystal thin film (wafer) as bulk or epitaxial layer structure.All current amendments available at time of purchase are included with the purchase of this document.

分类信息

发布单位或类别：英国-英国标准学会

关联关系

研制信息

相似标准/计划/法规

KS L ISO 20507(2021 Confirm)

파인 세라믹스－용어
精细陶瓷（高级陶瓷高级工业陶瓷）－词汇

Fine ceramics (advanced ceramics, advanced technical ceramics) — Vocabulary
精细陶瓷（高级陶瓷、高级工业陶瓷）.词汇

파인 세라믹스－용어
精细陶瓷（高级陶瓷、高级工业陶瓷）词汇

GB/T 17991-2009

精细陶瓷术语
Fine ceramics (advanced ceramics, advanced technical ceramics) - Vocabulary

KS L ISO 15165(2021 Confirm)

파인 세라믹스－분류 체계
精细陶瓷（高级陶瓷、高级工业陶瓷）－分类体系

KS L ISO 15165(2016 Confirm)

파인 세라믹스－분류 체계
精细陶瓷（高级陶瓷、高级工业陶瓷）分类体系

Fine ceramics (advanced ceramics, advanced technical ceramics) — Classification system
精细陶瓷（高级陶瓷、高级工业陶瓷）——分类系统

GB/T 23807-2009

精细陶瓷分类系统
Fine ceramics (advanced ceramics, advanced technical ceramics) - Classification systemecification

KS L 1618(2018 Confirm)

파인 세라믹스 — 과립특성 측정방법
精细陶瓷（高级陶瓷、高级工业陶瓷）陶瓷颗粒性能试验方法

KS L 1618(2023 Confirm)

파인 세라믹스 — 과립특성 측정방법
精细陶瓷（高级陶瓷、高级工业陶瓷）陶瓷颗粒性能试验方法

BS ISO 17841-2015

Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for thermal fatigue of fine ceramics substrate
精细陶瓷（高级陶瓷、高级工业陶瓷）精细陶瓷基片热疲劳试验方法

Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for thermal fatigue of fine ceramics substrate
精细陶瓷（先进陶瓷先进技术陶瓷） - 精细陶瓷基板的热疲劳试验方法

BS ISO 18550-2016

Fine ceramics (advanced ceramics, advanced technical ceramics). Testing method for macroheterogeneity in microstructure
精细陶瓷（高级陶瓷、高级工业陶瓷）微观结构宏观不均匀性测试方法

精细陶瓷压缩强度试验方法
Test method for compressive strength of fine ceramics (advanced ceramics, advanced technical ceramics)

BS EN ISO 14629-2016

Fine ceramics (advanced ceramics, advanced technical ceramics). Determination of flowability of ceramic powders
精细陶瓷（高级陶瓷、高级工业陶瓷）陶瓷粉末流动性的测定

BS ISO 19634-2017

Fine ceramics (advanced ceramics, advanced technical ceramics). Ceramic composites. Notations and symbols
精细陶瓷（高级陶瓷、高级工业陶瓷）陶瓷复合材料符号和符号

BS ISO 14629-2012

Fine ceramics (advanced ceramics, advanced technical ceramics). Determination of flowability of ceramic powders
精细陶瓷（高级陶瓷、高级工业陶瓷）陶瓷粉末流动性的测定

BS EN ISO 19634-2021

Fine ceramics (advanced ceramics, advanced technical ceramics). Ceramic composites. Notations and symbols
精细陶瓷（高级陶瓷、高级工业陶瓷）陶瓷复合材料符号和符号

Fine ceramics (advanced ceramics, advanced technical ceramics) — Ceramic composites — Notations and symbols
精细陶瓷（先进陶瓷先进技术陶瓷） - 陶瓷复合材料 - 符号和符号

Fine ceramics (advanced ceramics, advanced technical ceramics) — Determination of flowability of ceramic powders
精细陶瓷（高级陶瓷、高级工业陶瓷）——陶瓷粉末流动性的测定

《国家标准化发展纲要》提出建设国家数字标准馆，推动标准化工作向数字化、网络化、智能化转型。中国标准化研究院正在全力推进国家数字标准馆建设，力争在2026年底建成“一个中心”和“一个平台”，即全球领先的标准数据资源中心，涵盖标准全生命周期的数字化、网络化、智能化研究与服务平台。

专题数据库

标准管理系统

大数据分析系统

标准智能研制系统