1.1 本指南旨在帮助使用能量色散光谱学（EDS）的人员使用扫描电子显微镜（SEM）或电子探针微分析仪（EPMA）对材料进行定量分析。它的目的不是取代正式的教学课程，而是为该技术的能力和局限性及其使用提供指导。有关该受试者的更详细处理，请参阅Goldstein等人。 ( 1. ) 本指南不包括透射电子显微镜（TEM）的EDS。 1.2 单位- 以国际单位制表示的数值应视为标准值。本标准不包括其他计量单位。 1.3 本标准并非旨在解决与其使用相关的所有安全问题（如有）。 本标准的用户有责任在使用前制定适当的安全、健康和环境实践，并确定监管限制的适用性。 1.4 本国际标准是根据世界贸易组织技术性贸易壁垒（TBT）委员会发布的《关于制定国际标准、指南和建议的原则的决定》中确立的国际公认标准化原则制定的。 ====意义和用途====== 5.1 本指南涵盖了量化微观结构中相的元素组成的程序。它包括使用标准和无标准方法的两种方法，并讨论了人们可以从该技术中预期的精度和准确性。 本指南适用于在SEM或EPMA上使用固态X射线探测器的EDS。 5.2 EDS是一种适用于以下元素的常规定量分析的技术: 1. )原子量大于或等于钠， 2. )按重量计以十分之一或以上的百分比存在，以及 3. )占据试样的几个立方微米或更多。原子序数低于钠的元素可以用超薄窗口或无窗口光谱仪进行分析，其精度通常低于较重元素。微量元素，定义为<1.0 %, 2. 可以进行分析，但与更高浓度的元素分析相比，精度较低。

1.1 This guide is intended to assist those using energy-dispersive spectroscopy (EDS) for quantitative analysis of materials with a scanning electron microscope (SEM) or electron probe microanalyzer (EPMA). It is not intended to substitute for a formal course of instruction, but rather to provide a guide to the capabilities and limitations of the technique and to its use. For a more detailed treatment of the subject, see Goldstein, et al. ( 1 ) This guide does not cover EDS with a transmission electron microscope (TEM). 1.2 Units— The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard. 1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use. 1.4 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee. ====== Significance And Use ====== 5.1 This guide covers procedures for quantifying the elemental composition of phases in a microstructure. It includes both methods that use standards as well as standardless methods, and it discusses the precision and accuracy that one can expect from the technique. The guide applies to EDS with a solid-state X-ray detector used on an SEM or EPMA. 5.2 EDS is a suitable technique for routine quantitative analysis of elements that are 1 ) heavier than or equal to sodium in atomic weight, 2 ) present in tenths of a percent or greater by weight, and 3 ) occupying a few cubic micrometres, or more, of the specimen. Elements of lower atomic number than sodium can be analyzed with either ultra-thin-window or windowless spectrometers, generally with less precision than is possible for heavier elements. Trace elements, defined as <1.0 %, 2 can be analyzed but with lower precision compared with analyses of elements present in greater concentration.