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现行 ASME B89.1.8-2011(R2021)
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Performance Evaluation of Displacement-Measuring Laser Interferometers 位移测量激光干涉仪的性能评估
发布日期: 2012-03-31
本标准规定了激光干涉仪的规范、评估、设置和使用要求和方法。本标准将明确讨论单通光学和单轴线性位移测量。该标准目前仅限于电离气体激光干涉仪系统。本版本的激光标准仅考虑单色激光。单色将包括零差系统和外差系统(见附录E),其中工作频率均位于与一个特定原子跃迁或塞曼多重态相关的多普勒展宽频带内。本标准的未来版本可能包括二极管激光系统、啁啾系统和双色干涉仪。应注意,本标准的折叠公共路径比较技术可用于将上述任何系统与标准He进行比较- 氖激光干涉仪。
This standard establishes requirements and methods for the specification, evaluation, setup and use of laser interferometers. This standard will explicitly discuss only single-pass optics and a single axis of linear displacement measurement.The standard is currently limited to ionized gas laser interferometer systems. Only single-color lasers will be considered in this version of the laser standard. Single color will include both homodyne systems and heterodyne systems (see Appendix E) where operating frequencies all lie within a Doppler broadened frequency band associated with one specific atomic transition or Zeeman multiplet. Diode laser systems, chirp systems, and two-color interferometers may be included in future versions of this standard. It should be noted that the folded common path comparison technique of this standard could be used to compare any of the above systems to a standard He-Ne laser interferometer.
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发布单位或类别: 美国-美国机械工程师协会
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