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现行 KS C 6564-2002(2017)
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열식 유량 센서의 시험 방법 热膜流量传感器的测试方法
发布日期: 2002-08-31
该规格规定了测量流体流动的半导体流量传感器的术语、符号及特性。特别适用于半导体热薄膜式流量传感器主要特性的测量方法。
이 규격은 유체의 유동을 측정하는 반도체 유량 센서의 용어, 기호 및 특성을 규정한다. 특히 반도체 열 박막식 유량 센서의 주요 특성을 측정하는 방법에 대하여 적용한다.
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