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Semiconductor devices. Micro-electromechanical devices-Electromechanical relaxation test method for freestanding conductive thin-films under room temperature 半导体器件 微机电设备
发布日期: 2018-03-15
BS IEC 62047-29:2017规定了用于测量机电性能的松弛试验方法 微机电系统(MEMS)用独立导电薄膜的特性 在控制应变和室温下。导电材料的独立式薄膜 广泛应用于MEMS、光电子和柔性/可穿戴电子产品中。 产品中的独立式薄膜承受外部和内部应力,这可能导致 在一段时间的操作中,即使在室温下也要放松,这种放松 导致产品电气性能随时间变化。本试验方法 适用于各向同性、均质和线性粘弹性材料。交叉引用:IEC 62047-2:2006IEC 62047-3:2006IEC 62047-21:2014IEC 62047-22:2014IEC 62047-8:2011购买本文件时可获得的所有现行修订版均包含在购买本文件中。
BS IEC 62047-29:2017 specifies a relaxation test method for measuring electromechanical properties of freestanding conductive thin films for micro-electromechanical systems (MEMS) under controlled strain and room temperature. Freestanding thin films of conductive materials are extensively utilized in MEMS, opto-electronics, and flexible/wearable electronics products. Freestanding thin films in the products experience external and internal stresses which could be relaxed even under room temperature during a period of operation, and this relaxation leads to time-dependent variation of electrical performances of the products. This test method is valid for isotropic, homogeneous, and linearly viscoelastic materials.Cross References:IEC 62047-2:2006IEC 62047-3:2006IEC 62047-21:2014IEC 62047-22:2014IEC 62047-8:2011All current amendments available at time of purchase are included with the purchase of this document.
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发布单位或类别: 英国-英国标准学会
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