Semiconductor devices. Micro-electromechanical devices-Electromechanical relaxation test method for freestanding conductive thin-films under room temperature
半导体器件 微机电设备
BS IEC 62047-29:2017 specifies a relaxation test method for measuring electromechanical
properties of freestanding conductive thin films for micro-electromechanical systems (MEMS)
under controlled strain and room temperature. Freestanding thin films of conductive materials
are extensively utilized in MEMS, opto-electronics, and flexible/wearable electronics products.
Freestanding thin films in the products experience external and internal stresses which could
be relaxed even under room temperature during a period of operation, and this relaxation
leads to time-dependent variation of electrical performances of the products. This test method
is valid for isotropic, homogeneous, and linearly viscoelastic materials.Cross References:IEC 62047-2:2006IEC 62047-3:2006IEC 62047-21:2014IEC 62047-22:2014IEC 62047-8:2011All current amendments available at time of purchase are included with the purchase of this document.