1.1本文件的目的是为原子力显微镜（AFM）的定量应用提供指导，以使用高度（z位移）测量确定以干燥形式沉积在平坦基底上的纳米颗粒的尺寸。与提供样品二维投影或二维图像的电子显微镜不同，AFM提供了三维表面轮廓。虽然横向尺寸受探针形状的影响，但位移测量可以提供高精度的纳米颗粒高度。如果假设粒子为球形，则高度测量值对应于粒子的直径。在本指南中，描述了在各种表面上分散金纳米颗粒的程序，使其适合通过间歇接触模式AFM进行成像和高度测量。然后讨论了AFM校准的一般程序和进行此类测量的操作。 最后，介绍了数据分析和报告的程序。用于举例说明这些程序的纳米颗粒是国家标准与技术研究所（NIST）的参考材料，在水溶液中含有柠檬酸盐稳定的带负电金纳米颗粒。 1.2以国际单位制表示的数值应视为标准值。本标准不包括其他计量单位。 1.3 本标准并非旨在解决与其使用相关的所有安全问题（如有）。本标准的用户有责任在使用前制定适当的安全和健康实践，并确定监管限制的适用性。 ====意义和用途====== 随着原子力显微镜测量技术的成熟和普及，该技术已被纳米技术研发界广泛采用，以至于现在它被认为是在纳米尺度上可视化和量化结构的不可或缺的工具。 无论是作为一种独立的方法还是作为其他尺寸测量方法的补充，AFM现在都是纳米颗粒测量工具箱中牢固确立的组件。截至本指南起草时，尚不存在基于原子力显微镜的纳米颗粒尺寸测定的国际标准。因此，本标准旨在为原子力显微镜的应用提供实用和计量指南，以便在探针穿过颗粒表面形成线轮廓时，根据最大位移测量基底支撑纳米颗粒的尺寸。

1.1 The purpose of this document is to provide guidance on the quantitative application of atomic force microscopy (AFM) to determine the size of nanoparticles deposited in dry form on flat substrates using height (z-displacement) measurement. Unlike electron microscopy, which provides a two-dimensional projection or a two-dimensional image of a sample, AFM provides a three-dimensional surface profile. While the lateral dimensions are influenced by the shape of the probe, displacement measurements can provide the height of nanoparticles with a high degree of accuracy and precision. If the particles are assumed to be spherical, the height measurement corresponds to the diameter of the particle. In this guide, procedures are described for dispersing gold nanoparticles on various surfaces such that they are suitable for imaging and height measurement via intermittent contact mode AFM. Generic procedures for AFM calibration and operation to make such measurements are then discussed. Finally, procedures for data analysis and reporting are addressed. The nanoparticles used to exemplify these procedures are National Institute of Standards and Technology (NIST) reference materials containing citrate-stabilized negatively charged gold nanoparticles in an aqueous solution. 1.2 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard. 1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. ====== Significance And Use ====== As AFM measurement technology has matured and proliferated, the technique has been widely adopted by the nanotechnology research and development community to the extent that it is now considered an indispensible tool for visualizing and quantifying structures on the nanoscale. Whether used as a stand-alone method or to complement other dimensional measurement methods, AFM is now a firmly established component of the nanoparticle measurement tool box. International standards for AFM-based determination of nanoparticle size are nonexistent as of the drafting of this guide. Therefore, this standard aims to provide practical and metrological guidance for the application of AFM to measure the size of substrate-supported nanoparticles based on maximum displacement as the probe is rastered across the particle surface to create a line profile.