本文件定义了纳米技术领域中与纳米制造工艺相关的术语。 本文件中的所有工艺术语均与纳米制造相关，然而，许多 这些过程并不完全与纳米尺度有关。非排他性条款在 定义。根据可控条件的不同，这些过程可能会在一定程度上产生材料特征 纳米尺度，或者更大的尺度。 还有许多其他术语可以命名工具、组件、材料、系统或控制方法 与纳米制造相关的计量方法超出了本文件的范围。购买本文件时可获得的所有当前修订均包含在购买本文件中。

This document defines terms related to nanomanufacturing processes in the field of nanotechnologies. All the process terms in this document are relevant to nanomanufacturing, however, many of the listed processes are not exclusively relevant to the nanoscale. Terms that are not exclusive are noted within the definitions. Depending on controllable conditions, such processes can result in material features at the nanoscale or, alternatively, at larger scales. There are many other terms that name tools, components, materials, systems control methods or metrology methods associated with nanomanufacturing that are beyond the scope of this document.All current amendments available at time of purchase are included with the purchase of this document.