本文件描述了通过光学元件（如涂层或未涂层光学元件、光子结构和透明、半透明或不透明材料）确定角分辨散射的程序。它包括散射到试样周围的散射球中，通常分为前后两个半球。这些程序适用于从极紫外5 nm到红外光谱15µm的辐射波长。购买本文件时可获得的所有当前修订均包含在购买本文件中。

This document describes procedures for the determination of the angle resolved scattering by optical components such as coated or uncoated optical elements, photonic structures, and materials that can be transparent, translucent, or opaque. It comprises scattering into the scattering sphere around the specimen usually separated into the backward and forward hemispheres. The procedures apply to wavelengths of radiation ranging from 5 nm in the extreme ultraviolet to 15 µm in the infrared spectral ranges.All current amendments available at time of purchase are included with the purchase of this document.