本指南提供了设计过滤系统的信息，以消除供应至洁净室和其他受控环境的空气中的微量（小于1 ppmv）空气分子污染（AMC）。该文件涵盖应用、潜在使用点、过滤方法、建筑材料、性能比较和后续评估。还讨论了过滤器对HVAC系统的二次影响以及外部对过滤系统的影响。

This Guideline provides information for designing filtration systems to eliminate trace amounts (less than 1 ppmv) of airborne molecular contamination (AMC) from the air supplied to cleanrooms and other controlled environments. The document covers applications, potential points of use, filtration methods, construction materials, performance comparison, and follow-up assessment. Also discussed are secondary impacts of the filters on the HVAC system and exterior impacts on the filtration system.