1.1 本规程涵盖了以1%的速率测试气体泄漏源的程序 × 10 −8. Pa m公司 3. /s（1 × 10 −9 标准cm 3. /0°C）或更高。这些试验方法可在任何可抽空的物体上进行，并可在其另一侧施加氦气或其他示踪气体。物体的结构必须能够排空至0.1 Pa（约10 −3. 托尔）。 1.2 介绍了三种试验方法； 1.2.1 试验方法A- 对于能够排空但没有固有泵送能力的被测物体。 1.2.2 试验方法B- 对于具有整体泵送能力的测试对象。 1.2.3 试验方法C- 对于试验方法B中的受试对象，其中受试对象的真空泵替换检漏仪（LD）中通常使用的真空泵。 1.3 单位- 以国际单位制或标准立方厘米/秒单位表示的值应单独视为标准值。每个系统中规定的值可能不是精确的等效值:因此，每个系统应独立于另一个系统使用。将两个系统的值合并可能会导致不符合标准。 1.4 本标准并非旨在解决与其使用相关的所有安全问题（如有）。 本标准的用户有责任在使用前制定适当的安全和健康实践，并确定监管限制的适用性。 1.5 本国际标准是根据世界贸易组织技术性贸易壁垒（TBT）委员会发布的《关于制定国际标准、指南和建议的原则的决定》中确立的国际公认标准化原则制定的。 ====意义和用途====== 5.1 试验方法A- 该测试方法是泄漏测试组件中最常用的方法。 部件测试与标准泄漏相关，并测量实际泄漏率。验收基于最大系统允许泄漏。对于大多数生产需求，验收基于对泄漏率低于既定泄漏率的零件的验收，这将确保部件在预计寿命内的安全性能。必须小心确保使用位于测试体积上代表性位置的标准泄漏对大型系统进行校准。因为体积往往很大（>1 m 3. )通常涉及低电导路径，应检查响应时间和系统灵敏度。 5.2 试验方法B- 本测试方法用于测试真空系统，作为新系统最终测试的一个步骤，或作为制造、环境测试或调节零件所用设备的维护实践。与测试方法A一样，大容量可能需要响应时间和系统灵敏度检查。 5.3 试验方法C- 只有在没有将LD连接到高真空泵出口的方便方法时，才使用本试验方法。如果使用氦LD，并且高真空泵是离子泵或低温泵，则泄漏测试最好在粗加工循环期间完成，因为这些泵在高真空中留下相对较高百分比的氦- 真空室。这将限制可以获得的最大灵敏度。

1.1 This practice covers procedures for testing the sources of gas leaking at the rate of 1 × 10 −8 Pa m 3 /s (1 × 10 −9 standard-cm 3 /s at 0°C) or greater. These test methods may be conducted on any object that can be evacuated and to the other side of which helium or other tracer gas may be applied. The object must be structurally capable of being evacuated to pressures of 0.1 Pa (approximately 10 −3 torr). 1.2 Three test methods are described; 1.2.1 Test Method A— For the object under test capable of being evacuated, but having no inherent pumping capability. 1.2.2 Test Method B— For the object under test with integral pumping capability. 1.2.3 Test Method C— For the object under test as in Test Method B, in which the vacuum pumps of the object under test replace those normally used in the leak detector (LD). 1.3 Units— The values stated in either SI or std-cc/sec units are to be regarded separately as standard. The values stated in each system may not be exact equivalents: therefore, each system shall be used independently of the other. Combining values from the two systems may result in non-conformance with the standard. 1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. 1.5 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee. ====== Significance And Use ====== 5.1 Test Method A— This test method is the most frequently used in leak testing components. Testing of components is correlated to a standard leak, and the actual leak rate is measured. Acceptance is based on the maximum system allowable leakage. For most production needs, acceptance is based on acceptance of parts leaking less than an established leakage rate, which will ensure safe performance over the projected life of the component. Care must be exercised to ensure that large systems are calibrated with the standard leak located at a representative place on the test volume. As the volume tends to be large (>1 m 3 ) and there are often low conductance paths involved, a check of the response time as well as system sensitivity should be made. 5.2 Test Method B— This test method is used for testing vacuum systems either as a step in the final test of a new system or as a maintenance practice on equipment used for manufacturing, environmental test, or conditioning parts. As with Test Method A, the response time and a system sensitivity check may be required for large volumes. 5.3 Test Method C— This test method is to be used only when there is no convenient method of connecting the LD to the outlet of the high-vacuum pump. If a helium LD is used and the high-vacuum pump is an ion pump or cryopump, leak testing is best accomplished during the roughing cycle, as these pumps leave a relatively high percentage of helium in the high-vacuum chamber. This will limit the maximum sensitivity that can be obtained.