本文将讨论半导体行业面临的不断变化的洁净室市场和技术要求。还将介绍Semciondutor洁净室的行业和所有者如何应对财务压力，以及平衡先进工艺领域技术要求的必要性。技术路线图和对洁净室所有者可能的解决方案的技术关注也将得到解决。单位:双引文:研讨会，ASHRAE交易，第109卷，第。堪萨斯城，2003年

This paper will address the changing cleanroom market and technology requirements facing the semiconductor industry. How the industry and owners of semcionductor cleanrooms are responding to the financial pressures and the need to balance technological requirements for advance process areas will also be presented. Technology roadmap and technological concerns with possible solutions for cleanroom owners will also be addressed.Units: Dual