ISO 14966:2002规定了使用扫描电子显微镜测定空气中无机纤维颗粒浓度的方法。该方法规定使用镀金、毛细管孔、轨道蚀刻膜过滤器，通过该过滤器可吸入已知体积的空气。使用能量色散X射线分析，该方法可以区分成分与石棉品种（如蛇纹石和角闪石）一致的纤维、石膏和其他无机纤维。附录C提供了可测量的纤维类型摘要。 ISO 14966:2002适用于环境空气中无机纤维颗粒浓度的测量。该方法也适用于测定建筑物内部大气中无机纤维颗粒的数值浓度，例如，测定去除含石棉产品后残留的空气中无机纤维颗粒的浓度。 长度大于5微米的纤维的浓度范围，在标准测量条件下可检测到的宽度范围内，约为每平方毫米过滤面积3至200根纤维。 由这些值表示的空气浓度（以每立方米纤维数为单位）是采样空气体积的函数。 注:该方法检测和分类宽度小于0.2微米的纤维的能力有限。如果采样大气中的气载纤维主要宽度小于0.2微米，则可以使用ISO 10312等透射电子显微镜方法来确定较小的纤维。

ISO 14966:2002 specifies a method using scanning electron microscopy for determination of the concentration of inorganic fibrous particles in the air. The method specifies the use of gold-coated, capillary-pore, track-etched membrane filters, through which a known volume of air has been drawn. Using energy-dispersive X-ray analysis, the method can discriminate between fibres with compositions consistent with those of the asbestos varieties (e.g. serpentine and amphibole), gypsum and other inorganic fibres. Annex C provides a summary of fibre types which can be measured. ISO 14966:2002 is applicable to the measurement of the concentrations of inorganic fibrous particles in ambient air. The method is also applicable for determining the numerical concentrations of inorganic fibrous particles in the interior atmospheres of buildings, for example, to determine the concentration of airborne inorganic fibrous particles remaining after the removal of asbestos-containing products. The range of concentrations for fibres with lengths greater than 5 micrometres, in the range of widths which can be detected under standard measurement conditions, is approximately 3 fibres to 200 fibres per square millimetre of filter area. The air concentrations, in fibres per cubic metre, represented by these values are a function of the volume of air sampled. NOTE The ability of the method to detect and classify fibres with widths lower than 0,2 micrometres is limited. If airborne fibres in the atmosphere being sampled are predominantly less than 0,2 micrometres in width, a transmission electron microscopy method such as ISO 10312 can be used to determine the smaller fibres.