Surface chemical analysis — Scanning-probe microscopy — Determination of geometric quantities using SPM: Calibration of measuring systems
表面化学分析.扫描探针显微镜.用SPM测定几何量:测量系统的校准
发布日期:
2014-05-12
ISO 11952:2014规定了在最高水平上测量几何量的扫描探针显微镜扫描轴的特征和校准方法。它适用于提供进一步校准的设备,不适用于一般工业用途,可能需要较低水平的校准。
ISO 11952:2014 specifies methods for characterizing and calibrating the scan axes of scanning-probe microscopes for measuring geometric quantities at the highest level. It is applicable to those providing further calibrations and is not intended for general industry use, where a lower level of calibration might be required.