1.1本规程涵盖了描述和报告仪器、样本参数、实验条件和数据简化程序所需的信息。二次离子质谱溅射深度剖面可以使用多种原束激发条件、质量分析、数据采集和处理技术获得 (1-4) . 1.2 局限性 — 这种做法仅限于传统的溅射深度剖面，其中信息在试样平面内的分析区域上平均。不包括允许分析区域内二次离子横向空间分辨率的离子微探针或显微镜技术，例如图像深度剖面。 1.3以国际单位制表示的数值应视为标准值。本标准不包括其他计量单位。 1.4 本标准并非旨在解决与其使用相关的所有安全问题（如有）。本标准的用户有责任在使用前制定适当的安全和健康实践，并确定监管限制的适用性。 ====意义和用途====== 本规程用于报告第6节中规定的实验条件 “ 方法 ” 或 “ 实验的 ” 其他出版物的章节（受编辑限制）。 该报告将包括每个数据集的具体条件，特别是如果出版物中不同溅射深度剖面数据集的任何参数发生变化。例如，表格或图形标题的脚注将用于指定不同的条件。

1.1 This practice covers the information needed to describe and report instrumentation, specimen parameters, experimental conditions, and data reduction procedures. SIMS sputter depth profiles can be obtained using a wide variety of primary beam excitation conditions, mass analysis, data acquisition, and processing techniques (1-4) . 1.2 Limitations — This practice is limited to conventional sputter depth profiles in which information is averaged over the analyzed area in the plane of the specimen. Ion microprobe or microscope techniques permitting lateral spatial resolution of secondary ions within the analyzed area, for example, image depth profiling, are excluded. 1.3 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard. 1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. ====== Significance And Use ====== This practice is used for reporting the experimental conditions as specified in Section 6 in the “ Methods ” or “ Experimental ” sections of other publications (subject to editorial restrictions). The report would include specific conditions for each data set, particularly, if any parameters are changed for different sputter depth profile data sets in a publication. For example, footnotes of tables or figure captions would be used to specify differing conditions.