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现行 IEST RP-CC024.1
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Measuring & Reporting Vibration in Microelectronic Facilities 微电子设备振动的测量与报告
发布日期: 2002-12-01
集成电路制造、测量和检验中使用的设备对振动和声音敏感。因此,有必要确定它们的振动敏感度水平,并确保设施或其所在现场发生的振动低于这些水平。最新RP-CC024。1旨在为微电子行业提供指导。它也可能适用于制药和生物研究、计量实验室以及振动控制非常重要的其他环境。
Equipment used in the manufacture, measurement, and inspection of integrated circuits is sensitive to vibration and sound. It is therefore necessary to establish levels of vibration sensitivity for them and to ensure that vibrations occurring in the facility or at the site at which they are located are below those levels. IEST RP-CC024.1 is intended to provide guidance in the microelectronics industry. It may also be applicable in pharmaceutical and biological research, metrology laboratories, and other contexts in which vibration control is important.
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