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硅晶体中间隙氧含量的红外吸收测量方法 Test method for determining interstitial oxygen content in silicon by infrared absorption
发布日期: 2018-09-17
实施日期: 2019-06-01
本标准规定了采用红外光谱法测定硅单晶晶体中间隙氧含量的方法
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