1.1本规程涵盖了扫描探针显微镜，并描述了探针形状和方向所需的参数。 1.2本规程还描述了一种测量扫描探针显微镜中使用的探针尖端形状和尺寸的方法。该方法采用了特殊的样本形状，称为探针表征器，可以用探针显微镜扫描以确定探针的尺寸。已经公布了从表征器扫描中提取探针形状的数学技术 (2-5). 本标准并非旨在解决与其使用相关的所有安全问题（如有）。本标准的用户有责任在使用前制定适当的安全和健康实践，并确定监管限制的适用性。 ====意义和用途====== 探针尖端的形状和方向决定了可以从扫描中可靠地提取哪些信息。 这适用于所有类型的扫描。例如，在表面粗糙度测量中，探针尖端半径对探针能够可靠测量的空间频率有着深远的影响。因此，在报告探针显微镜的数据时，获取并在报告中包含有关探针尖端形状的信息非常重要。

1.1 This practice covers scanning probe microscopy and describes the parameters needed for probe shape and orientation. 1.2 This practice also describes a method for measuring the shape and size of a probe tip to be used in scanning probe microscopy. The method employs special sample shapes, known as probe characterizers, which can be scanned with a probe microscope to determine the dimensions of the probe. Mathematical techniques to extract the probe shape from the scans of the characterizers have been published (2-5). This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. ====== Significance And Use ====== The shape and orientation of the probe tip determines which information can be reliably extracted from a scan. This applies to all types of scans. For instance, in surface roughness measurement, the probe tip radius has a profound effect on the spatial frequencies that the probe can reliably measure. Consequently, in reporting data from a probe microscope, it is important to obtain and include in the report information about the shape of the probe tip.