1.1 本指南涵盖表面分析前的样本处理和准备，适用于以下表面分析学科: 1.1.1 俄歇电子能谱（AES）， 1.1.2 X射线光电子能谱（XPS或ESCA），以及 1.1.3 二次离子质谱（SIMS）。 1.1.4 虽然这些方法主要用于AES、XPS和SIMS，但也可以应用于许多表面敏感分析方法，如离子散射光谱法、低能电子衍射和电子能量损失光谱法，其中样本处理可能会影响表面敏感测量。 1.2 本标准并非旨在解决与其使用相关的所有安全问题（如有）。本标准的用户有责任在使用前制定适当的安全、健康和环境实践，并确定监管限制的适用性。 1.3 本国际标准是根据世界贸易组织技术性贸易壁垒（TBT）委员会发布的《关于制定国际标准、指南和建议的原则的决定》中确立的国际公认标准化原则制定的。 ====意义和用途====== 4.1 样本的正确处理和制备对于分析尤为关键。样本处理不当可能导致表面成分改变和数据不可靠。应小心处理样本，以避免引入虚假污染物。目标必须是保持表面状态，以便分析仍然能够代表原始主体。 4.2 AES、XPS和SIMS对通常几纳米厚的表层很敏感。 由于样本处理不当，此类薄层可能会受到严重干扰 ( 1. ) . 4. 4.3 本指南描述了最小化样本处理对使用表面敏感分析技术获得的结果的影响的方法。它适用于样品所有者或表面分析服务的购买者和表面分析员。由于样本类型和所需信息范围广泛，此处仅提供了广泛的指南和一般示例。最佳处理程序取决于特定样本和所需信息。建议样本供应商尽快咨询表面分析员，了解样本历史、待解决的具体问题或所需信息，以及所需的特定样本制备或处理程序。 表面分析员也可参考指南 E1078 这讨论了制备、安装和分析样本的附加程序。

1.1 This guide covers specimen handling and preparation prior to surface analysis and applies to the following surface analysis disciplines: 1.1.1 Auger electron spectroscopy (AES), 1.1.2 X-ray photoelectron spectroscopy (XPS or ESCA), and 1.1.3 Secondary ion mass spectrometry (SIMS). 1.1.4 Although primarily written for AES, XPS, and SIMS, these methods may also apply to many surface-sensitive analysis methods, such as ion scattering spectrometry, low-energy electron diffraction, and electron energy loss spectroscopy, where specimen handling can influence surface-sensitive measurements. 1.2 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use. 1.3 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee. ====== Significance And Use ====== 4.1 Proper handling and preparation of specimens is particularly critical for analysis. Improper handling of specimens can result in alteration of the surface composition and unreliable data. Specimens should be handled carefully so as to avoid the introduction of spurious contaminants. The goal must be to preserve the state of the surface so that analysis remains representative of the original subject. 4.2 AES, XPS, and SIMS are sensitive to surface layers that are typically a few nanometres thick. Such thin layers can be subject to severe perturbations from improper specimen handling ( 1 ) . 4 4.3 This guide describes methods to minimize the effects of specimen handling on the results obtained using surface-sensitive analytical techniques. It is intended for the specimen owner or the purchaser of surface analytical services and the surface analyst. Because of the wide range of types of specimens and desired information, only broad guidelines and general examples are presented here. The optimum handling procedures will be dependent on the particular specimen and the needed information. It is recommended that the specimen supplier consult the surface analyst as soon as possible with regard to specimen history, the specific problem to be solved or information needed, and the particular specimen preparation or handling procedures required. The surface analyst also is referred to Guide E1078 that discusses additional procedures for preparing, mounting, and analysis of specimens.