1.1 本指南涵盖了表面分析之前、期间和之后的样品制备和安装，并适用于以下表面分析学科: 1.1.1 俄歇电子能谱（AES）， 1.1.2 X射线光电子能谱（XPS和ESCA），以及 1.1.3 二次离子质谱（SIMS）。 1.1.4 虽然这些方法主要用于AES、XPS和SIMS，但也适用于许多表面敏感分析方法，如离子散射光谱法、低能电子衍射和电子能量损失光谱法，其中样本处理可能会影响表面敏感测量。 1.2 以国际单位制表示的数值应视为标准值。本标准不包括其他计量单位。 1.3 本标准并非旨在解决与其使用相关的所有安全问题（如有）。 本标准的用户有责任在使用前制定适当的安全、健康和环境实践，并确定监管限制的适用性。 1.4 本国际标准是根据世界贸易组织技术性贸易壁垒（TBT）委员会发布的《关于制定国际标准、指南和建议的原则的决定》中确立的国际公认标准化原则制定的。 ====意义和用途====== 4.1 试样的正确制备和安装对于表面分析尤为关键。试样制备不当可能导致表面成分的改变和不可靠的数据。应小心处理试样，以避免在制备和安装过程中引入假污染物。 目标必须是保持曲面的状态，以便分析仍然能够代表原始曲面。 4.2 AES、XPS或ESCA和SIMS对通常几纳米厚的表面层敏感。这种薄层可能会受到样本处理引起的严重扰动 ( 1. ) 4. 或在引入分析室之前可能需要的表面处理。此外，样本安装技术可能会影响预期分析。 4.3 本指南描述了当使用任何表面敏感分析技术时，表面分析员可能需要将试样制备的影响降至最低的方法。还描述了安装样本的方法，以确保所需信息不受损害。 4.4 指导 E1829 描述了表面敏感样本的处理，因此，补充了本指南。

1.1 This guide covers specimen preparation and mounting prior to, during, and following surface analysis and applies to the following surface analysis disciplines: 1.1.1 Auger electron spectroscopy (AES), 1.1.2 X-ray photoelectron spectroscopy (XPS and ESCA), and 1.1.3 Secondary ion mass spectrometry (SIMS). 1.1.4 Although primarily written for AES, XPS, and SIMS, these methods will also apply to many surface sensitive analysis methods, such as ion scattering spectrometry, low energy electron diffraction, and electron energy loss spectroscopy, where specimen handling can influence surface sensitive measurements. 1.2 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard. 1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use. 1.4 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee. ====== Significance And Use ====== 4.1 Proper preparation and mounting of specimens is particularly critical for surface analysis. Improper preparation of specimens can result in alteration of the surface composition and unreliable data. Specimens should be handled carefully so as to avoid the introduction of spurious contaminants in the preparation and mounting process. The goal must be to preserve the state of the surface so that the analysis remains representative of the original. 4.2 AES, XPS or ESCA, and SIMS are sensitive to surface layers that are typically a few nanometres thick. Such thin layers can be subject to severe perturbations caused by specimen handling ( 1 ) 4 or surface treatments that may be necessary prior to introduction into the analytical chamber. In addition, specimen mounting techniques have the potential to affect the intended analysis. 4.3 This guide describes methods that the surface analyst may need to minimize the effects of specimen preparation when using any surface-sensitive analytical technique. Also described are methods to mount specimens so as to ensure that the desired information is not compromised. 4.4 Guide E1829 describes the handling of surface sensitive specimens and, as such, complements this guide.