IEST RP-CC013.3涵盖了洁净室特性化中使用的设备的校准和验证程序，以及确定校准间隔的程序。RP包括校准气溶胶发生器、光度计、风速计、气流捕捉罩、温度测量系统和设备、压力计和真空计、聚微球（PSL）发生器、气溶胶稀释剂和冷凝核计数器的一般程序。如果可用，提供校准其他仪器的参考

IEST RP-CC013.3 covers procedures for calibrating and verifying equipment used in char-acterizing cleanrooms and for determining intervals of calibration. The RP includes general procedures for calibrating aerosol generators, photometers, ane-mometers, airflow capture hoods, temperature measurement systems and devices, pressure and vacuum gauges, polymicrosphere (PSL) generators, aerosol diluters, and condensation nuclei counters. Where available, references for calibrating other instruments are provided