1.1 本规程涵盖了以1%的速率测试和定位气体泄漏源的程序 × 10 −8. Pa m公司 3. /s（1 × 10 −9 标准cm 3. /s） 3. 或更大。试验可在任何可抽空的待测物体上进行，并可在另一侧施加氦气或其他示踪气体。 1.2 描述了三种测试方法: 1.2.1 试验方法A- 对于能够排空但没有固有泵送能力的被测物体。 1.2.2 试验方法B- 对于具有整体泵送能力的测试对象。 1.2.3 试验方法C- 对于试验方法B中的受试对象，其中受试对象的真空泵替换检漏仪中通常使用的真空泵。 1.3 单位- 以国际单位制或标准立方厘米/秒单位表示的值应单独视为标准值。每个系统中规定的值可能不是精确的等效值:因此，每个系统应独立于另一个系统使用。将两个系统的值合并可能会导致不符合标准。 1.4 本标准并非旨在解决与其使用相关的所有安全问题（如有）。本标准的用户有责任在使用前制定适当的安全、健康和环境实践，并确定监管限制的适用性。 1.5 本国际标准是根据世界贸易组织技术性贸易壁垒（TBT）委员会发布的《关于制定国际标准、指南和建议的原则的决定》中确立的国际公认标准化原则制定的。 ====意义和用途====== 6.1 测试方法A是泄漏测试部件中最常用的方法，其结构能够排空至0.1 Pa（约10 −3. 托尔）。小部件的测试可以与校准的泄漏相关联，并且可以测量实际泄漏率，或者可以根据最大允许泄漏进行验收。 对于大多数生产需求，验收基于对泄漏低于既定标准的零件的验收，这将确保部件在预计寿命内的安全性能。必须小心确保在测试体积上的代表性位置使用参考泄漏校准大型系统。泄漏率是通过计算在设备预期寿命内可能导致故障的测试零件泄漏的净增益或损失来确定的。 6.2 测试方法B用于测试真空系统，作为新系统最终测试的一个步骤，或作为用于制造、环境测试或调节零件的设备的维护实践。 由于体积往往较大，应检查响应时间和系统灵敏度。以升为单位的系统体积除以以升/秒为单位的真空泵速度，将使响应时间达到63 % 总信号的。响应时间超过几秒会使泄漏检测变得困难。 6.3 只有在没有方便的方法将检漏仪连接到高真空泵出口时，才使用试验方法C。如果使用氦检漏仪，并且高真空泵是离子泵或低温泵，则泄漏测试最好在粗加工循环期间完成，因为这些泵在高真空室中留下相对较高百分比的氦。 这将掩盖除大泄漏外的所有泄漏，微量气体将迅速使泵饱和。

1.1 This practice covers procedures for testing and locating the sources of gas leaking at the rate of 1 × 10 −8 Pa m 3 /s (1 × 10 −9 Std cm 3 /s) 3 or greater. The test may be conducted on any object to be tested that can be evacuated and to the other side of which helium or other tracer gas may be applied. 1.2 Three test methods are described: 1.2.1 Test Method A— For the object under test capable of being evacuated, but having no inherent pumping capability. 1.2.2 Test Method B— For the object under test with integral pumping capability. 1.2.3 Test Method C— For the object under test as in Test Method B, in which the vacuum pumps of the object under test replace those normally used in the leak detector. 1.3 Units— The values stated in either SI or std-cc/sec units are to be regarded separately as standard. The values stated in each system may not be exact equivalents: therefore, each system shall be used independently of the other. Combining values from the two systems may result in non-conformance with the standard. 1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use. 1.5 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee. ====== Significance And Use ====== 6.1 Test Method A is the most frequently used in leak testing components which are structurally capable of being evacuated to pressures of 0.1 Pa (approximately 10 −3 torr). Testing of small components can be correlated to calibrated leaks, and the actual leak rate can be measured or acceptance can be based on a maximum allowable leak. For most production needs acceptance is based on acceptance of parts leaking less than an established standard which will ensure safe performance over the projected life of the component. Care must be exercised to ensure that large systems are calibrated with reference leak at a representative place on the test volume. Leak rates are determined by calculating the net gain or loss through a leak in the test part that would cause failure during the expected life of the device. 6.2 Test Method B is used for testing vacuum systems either as a step in the final test of a new system or as a maintenance practice on equipment used for manufacturing, environmental test or for conditioning parts. As the volume tends to be large, a check of the response time as well as system sensitivity should be made. Volume of the system in liters divided by the speed of the vacuum pump in L/s will give the response time to reach 63 % of the total signal. Response times in excess of a few seconds makes leak detection difficult. 6.3 Test Method C is to be used only when there is no convenient method of connecting the leak detector to the outlet of the high vacuum pump. If a helium leak detector is used and the high vacuum pump is an ion pump or cryopump, leak testing is best accomplished during the roughing cycle as these pumps leave a relatively high percentage of helium in the high vacuum chamber. This will obscure all but large leaks, and the trace gas will quickly saturate the pumps.