Standard Test Methods for Leakage Measurement Using the Mass Spectrometer Leak Detector or Residual Gas Analyzer in the Hood Mode
用质谱仪检漏仪或罩式残余气体分析仪进行泄漏测量的标准试验方法
发布日期:
1999-06-10
1.1这些测试方法包括以4.4 X 10的速率测试气体泄漏源的程序
-14
摩尔/秒(1 X 10
-9
标准cm
/0°C)或更高。试验可在任何可抽空的物体上进行,并可在其另一侧施加氦气或其他示踪气体。物体的结构必须能够排空至0.1 Pa(约10
-3
托尔)。
1.2描述了三种试验方法;
1.2.1试验方法A-对于能够排空但没有固有泵送能力的受试物体。
1.2.2试验方法B-用于具有整体泵送能力的受试物体。
1.2.3试验方法C-对于试验方法B中的受试对象,其中受试对象的真空泵替换检漏仪(LD)中通常使用的真空泵。
1.3以国际单位制表示的数值应视为标准。
括号中给出的值仅供参考。
1.4本标准无意解决与其使用相关的所有安全问题(如有)。本标准的用户有责任在使用前制定适当的安全和健康实践,并确定监管限制的适用性。
1.1 These test methods cover procedures for testing the sources of gas leaking at the rate of 4.4 X 10
-14
moles/s (1 X 10
-9
std-cm
/s at 0°C) or greater. The test may be conducted on any object that can be evacuated and to the other side of which helium or other tracer gas may be applied. The object must be structurally capable of being evacuated to pressures of 0.1 Pa (approximately 10
-3
torr).
1.2 Three test methods are described;
1.2.1 Test Method A -For the object under test capable of being evacuated, but having no inherent pumping capability.
1.2.2 Test Method B -For the object under test with integral pumping capability.
1.2.3 Test Method C -For the object under test as in Test Method B, in which the vacuum pumps of the object under test replace those normally used in the leak detector (LD).
1.3 The values stated in SI units are to be regarded as the standard. The values given in parentheses are for information only.
1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.