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Standard Test Method for Sizing and Counting Airborne Particulate Contamination in Cleanrooms and Other Dust-Controlled Areas 洁净室和其他防尘区域空气中颗粒污染物的大小和计数的标准试验方法
发布日期: 2021-04-01
1.1 本试验方法涵盖5µm及以上空气颗粒物(大颗粒)的计数和尺寸确定。采样区域特别是那些具有洁净室和粉尘控制区域典型污染水平的区域。 1.2 单位- 以国际单位制或英寸-磅单位表示的数值应单独视为标准值。每个系统中规定的值不一定是精确的等价物;因此,为确保符合本标准,每个系统应独立使用,且两个系统的值不得组合。 1.3 本标准并非旨在解决与其使用相关的所有安全问题(如有)。本标准的用户有责任在使用前制定适当的安全、健康和环境实践,并确定监管限制的适用性。 1.4 本国际标准是根据世界贸易组织技术性贸易壁垒(TBT)委员会发布的《关于制定国际标准、指南和建议的原则的决定》中确立的国际公认标准化原则制定的。
1.1 This test method covers counting and sizing airborne particulate matter 5 µm and larger (macroparticles). The sampling areas are specifically those with contamination levels typical of cleanrooms and dust-controlled areas. 1.2 Units— The values stated in either SI units or inch-pound units are to be regarded separately as standard. The values stated in each system are not necessarily exact equivalents; therefore, to ensure conformance with the standard, each system shall be used independently of the other, and values from the two systems shall not be combined. 1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use. 1.4 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.
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归口单位: E21.05
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