Vacuum technology — Valves — Leak test
真空技术——阀门和阀门;泄漏试验
发布日期:
2009-11-30
ISO 27895:2009规定了用于控制真空系统中气体流量或真空压力的真空阀的泄漏测试方法。它适用于可以关闭到泄漏率小于1 x 10-5 Pa m3/s的微量气体的真空阀。这些方法采用阀体的密封装置,其也在ISO 27895:2009中规定。这些方法适用于阀门规格的验证。
在操作期间和之后,低于制造商规定的标称泄漏率的阀泄漏率使得能够规定诸如操作压力范围、端口之间的允许压力差、烘烤温度或操作温度以及寿命周期之类的阀操作条件。
ISO 27895:2009 specifies methods for the leak testing of vacuum valves used for control of gas flow or vacuum pressure in a vacuum system.It is applicable to vacuum valves that can be closed to leak rates less than 1 x 10-5 Pa m3/s for trace gas. The methods employ a sealing arrangement for the valve body, which is also specified in ISO 27895:2009. The methods are suitable for the verification of valve specifications.
A valve leak rate less than the nominal leak rate specified by the manufacturer during and after the operation enables the specification of such valve operating conditions as operating pressure range, permissible pressure difference between ports, bake-out temperature or operating temperature, and life cycle.