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Vacuum Gauge Calibration 真空计校准
发布日期: 2019-03-06
本SAE航空航天推荐规程(ARP)阐述了在校准热导率和冷阴极真空计时最小化不确定性的最佳实践的一般程序,其中包括进行压力测量所需的真空传感器和配套电子设备。它还包括过程中验证的最佳实践,其中的限制使其无法遵循最佳实践来最小化不确定性。验证真空计的准确性和操作对于确保在真空条件下维护过程至关重要。
This SAE Aerospace Recommended Practice (ARP) addresses the general procedure for the best practices for minimizing uncertainty when calibrating thermal conductivity and cold cathode vacuum gauges, which includes the vacuum sensor(s) and accompanying electronics necessary for a pressure measurement to be made. It also includes the best practices for an in-process verification where limitations make it impossible to follow the best practices for minimizing uncertainty.Verifying the accuracy and operation of vacuum gauges is critical to ensure the maintenance of processes while under vacuum.
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