现行

VDI 2083 Sheet 5.2

Cleanroom technology - Cleanroom operation - Decontamination of multiple-use cleanroom clothing
洁净室技术.洁净室操作.多用途洁净室衣物的去污

2008-10-01

现行

UNE-ENV 1631-1997

CLEANROOM TECHNOLOGY. DESIGN, CONSTRUCTION AND OPERATION OF CLEANROOMS AND CLEAN AIR DEVICES.
洁净室技术 洁净室和洁净空气装置的设计、施工和运行

1997-06-11

现行

VDI 2083 Sheet 4.1

Cleanroom technology - Planning, construction and start-up of cleanrooms
洁净室技术——洁净室的规划、建设和启动

2006-10-01

现行

VDI 2083 Sheet 8.1

Cleanroom technology - Molecular contamination of cleanroom air (AMC)
洁净室技术.洁净室空气的分子污染（AMC）

2009-07-01

现行

VDI 2083 Sheet 11

Cleanroom technology - Quality assurance
洁净室技术-质量保证

2008-01-01

现行

ASTM E2352-19

Standard Practice for Aerospace Cleanrooms and Associated Controlled Environments—Cleanroom Operations
航空航天洁净室和相关受控环境的标准实施规程&x2014；洁净室操作

2019-05-01

现行

BS EN ISO 14644-5-2004

Cleanrooms and associated controlled environments-Operations
洁净室和相关受控环境

2004-08-18

现行

KC-03-09-3

Integrating Technology Changes Into Microelectronic Cleanrooms
将技术变革融入微电子洁净室

现行

KC-03-09-3

Integrating Technology Changes Into Microelectronic Cleanrooms
将技术变革融入微电子洁净室

现行

VDI 2083 Sheet 3

Cleanroom technology - Metrology and test methods
洁净室技术.计量和试验方法

2005-07-01

现行

VDI 2083 Sheet 12

Cleanroom technology - Safety and environmental aspects
洁净室技术-安全和环境方面

2000-01-01

现行

VDI 2083 Sheet 7

Cleanroom technology - Cleanliness of process media
洁净室技术-工艺介质的清洁度

2006-11-01

现行

VDI 2083 Sheet 15

Cleanroom technology - Personnel at the clean work place
洁净室技术——洁净工作场所的人员

2007-04-01

现行

VDI 2083 Sheet 18-DRAFT

Draft Document - Cleanroom technology - Biocontamination control
文件草案-洁净室技术-生物污染控制

2010-11-01

现行

VDI 2083 Sheet 4.2-DRAFT

Draft Document - Cleanroom technology - Energy efficiency
文件草案-洁净室技术-能源效率

2009-10-01

现行

VDI 2083 Sheet 1

Cleanroom technology - Particulate air cleanliness classes
洁净室技术.颗粒空气清洁度等级

2005-05-01

现行

ISO 14644-5-2004

Cleanrooms and associated controlled environments — Part 5: Operations
洁净室和相关的受控环境第5部分:操作

2004-08-13

现行

KS I ISO 14644-5

클린룸 및 제어된 환경 — 제5부: 운영
洁净室和相关控制环境 - 第5部分:操作

2020-12-30

现行

GB/T 25915.5-2010

洁净室及相关受控环境 第5部分：运行
Cleanrooms and associated controlled environments - Part 5: Operations

2011-01-14

现行

GOST R ISO 14644-5-2005

Чистые помещения и связанные с ними контролируемые среды. Часть 5. Эксплуатация
洁净室和相关的受控环境 第五部分